Silicon carbide microelectromechanical systems for harsh...

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Silicon carbide microelectromechanical...

Silicon carbide microelectromechanical systems for harsh environments

Name: Silicon carbide microelectromechanical systems for harsh environments
ISBN: 9781860946240

Rebecca Cheung

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This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product.

Kateqoriyalar:

Engineering

İl:

2006

Nəşr:

illustrated edition

Nəşriyyat:

Imperial College Press; Distributed by World Scientific Pub

Dil:

english

Səhifələr:

193